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Crystallinity Effect on the Photocatalytic Performance of TiO2 Thin Films Prepared by CVD Process

Category : Physical Science
Author : Sumet Sakulsermsuk*, Saranyoo Chaiwichian, Pisith Singjai, Natda Wetchakun
Email : sumet.s@cmu.ac.th
Keyword : Titanium dioxide, chemical vapor deposition, photocatalyst, thin films, methylene blue
Volume : Microsc. Microanal. Res. 2017 30(1)
DOI Number : 10.14456/microsc-microanal-res.2017.1
Download Start & End Page : 1 - 5


TiO2 thin films were synthesized by using chemical vapor deposition (CVD) process at 530°C to examine the effect of CVD synthesis time on physical and optical properties, and photocatalytic activities. Thin films of nano-sized spherical TiO2 particles were produced on borosilicate glass substrates by the CVD process for 60 min and 90 min. As the synthesizing time increased, the particle size of the TiO2 films increased, but the thicknesses of the films decreased. The band gaps of the films prepared by deposition for 60 and 90 min were 3.51 and 3.25 eV, respectively. The photocatalytic activities of the TiO2 thin films were monitored by studying the degradation of methylene blue under simulated solar light irradiation. The rate constant of methylene blue decomposition was found to increase from 4×10-4 to 6×10-4 min-1 when increasing the synthesis time from 60 min to 90 min. We proposed that the crystallinity of TiO2 films is the main factor to enhance photocatalytic efficiency.

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